Vacuum Chamber Port Plate

Name: Vacuum Port Interface Plate Leak-Tight Sealing Solution – Frigate
Price: 249.00 USD
Availability: InStock

Vacuum Chamber Port Plate ensures critical vacuum interface alignment by maintaining surface flatness below 25 µm over the sealing area. This flatness is essential for metallic or elastomer seals under ultra-high vacuum conditions. Port plate distortion during bolt torque application is minimized through stress-relieved manufacturing and symmetric design geometry. Flatness verification using laser interferometry enables consistent vacuum sealing performance during multiple thermal cycles.

Overall Dimensions

100–1000 mm (L/W) (±0.1 mm), Thickness – 10–50 mm (±0.05 mm)

Material Specification

SS 304L/316L (ASTM A240), Aluminum 6061-T6 (ASTM B209), OFHC Copper (ASTM B152)

Port Hole Diameters

CF – DN40–DN250 (±0.02 mm), ISO-KF – 10–100 mm (±0.05 mm), NPT – 1/4″–2″ (±0.1 mm)

Number/Location of Ports

1–20 ports (±0.05 mm positional tolerance), Radial/Axial per CAD layout

Port Connection Type

ConFlat (CF) with knife-edge, ISO-KF (clamp-type), NPT (threaded), or Custom (e.g., ASA/ASAI)

Product Description

Vacuum Chamber Port Plate must maintain structural and dimensional stability during bake-out cycles exceeding 200 °C. Plates fabricated from 316L stainless steel or 6061-T6 aluminum are selected based on matched thermal expansion coefficients relative to the chamber body. Precision annealing and post-machining stabilization prevent warping or deformation. The port plate’s consistent behavior under thermal gradients is critical to prevent seal displacement or flange creep.

Surface Finish

Vacuum Face – Ra ≤ 0.4 µm (mirror), Non-contact – Ra ≤ 1.6 µm, CF Knife-edge – Ra ≤ 0.2 µm

Leak Rate

≤1×10⁻⁹ torr·L/s (helium leak test), ≤5×10⁻¹⁰ torr·L/s (for UHV applications)

Mounting Hole Pattern

M6–M12 threaded (±0.02 mm), Counterbored for flush mounting (±0.05 mm depth)

Sealing Surface Geometry

CF – 2° knife-edge angle (±0.1°), Flatness ≤0.025 mm, ISO-KF – O-ring groove ±0.03 mm

Certification Standard

ASTM A480 (SS), ASME BPVC Sec.VIII, ISO 9001, SEMI F72 (for semiconductor)

Technical Advantages

Vacuum Chamber Port Plate contributes to system base pressure through its outgassing characteristics. Electropolished and vacuum-baked surfaces reduce desorption rates by minimizing micro-asperities and contamination traps. For UHV and XHV systems, passivated or vacuum-fired variants are used to ensure hydrocarbon-free operation. All vacuum-contact surfaces meet <10 µg/cm² of total hydrocarbon residue and are inspected under ISO 14644-1 cleanroom standards.

Vacuum Chamber Port Plate is manufactured using certified vacuum-grade alloys to ensure minimal magnetic permeability and high corrosion resistance. For UHV applications, 316L VM or titanium options are available for reduced magnetic interference and enhanced chemical compatibility. All materials are verified using spectroscopic composition analysis to prevent inclusions that may contribute to virtual leaks or ion trap effects.

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Industry Applications

Semiconductor Etching Systems

Vacuum Chamber Port Plate provides gas inlet and optical access interfaces for plasma etching and ion beam lithography environments.

Surface Science Instrumentation

Vacuum Chamber Port Plate enables integration of LEED, AES, and XPS probes through precision-aligned, ultra-high vacuum sealed ports.

Thin Film Deposition Chambers

Vacuum Chamber Port Plate supports target alignment, substrate handling, and sputtering source connections under high-vacuum deposition conditions.

Synchrotron Beamline Chambers

Vacuum Chamber Port Plate maintains optical axis precision and ports instrumentation into beamlines operating at <10⁻⁹ Torr vacuum levels.

Nuclear Fusion Test Reactors

Vacuum Chamber Port Plate interfaces diagnostic ports, Langmuir probes, and viewing windows in high-temperature, neutron-rich fusion environments.

Cryogenic Vacuum Chambers

Vacuum Chamber Port Plate accommodates thermal breaks, sensor feedthroughs, and superconducting cable interfaces in ultra-cold vacuum environments.

Port Configuration and Feedthrough Integration

Vacuum Chamber Port Plate allows multi-functional port arrangements including CF, ISO-K, KF, and custom-pattern feedthroughs. Tapped and blind holes are precision located within ±50 µm positional tolerance to accommodate viewports, electrical feedthroughs, manipulators, or optical devices. Integration with multi-axis manipulators or beamlines is enabled through exact concentricity between central ports and alignment reference bores.

Vacuum Chamber Port Plate undergoes helium leak testing down to 1×10⁻¹⁰ mbar∙L/s, ensuring structural and seal integrity under UHV operation. Vacuum sealing faces are machined with surface roughness <0.4 µm Ra to interface properly with copper or Viton gaskets. Each plate is optionally tested in accordance with ISO 20485 standards and supplied with test documentation for system validation.

Having Doubts? Our FAQ

Check all our Frequently Asked Question

How does Frigate ensure leak-tight performance in its Vacuum Chamber Port Plate assemblies?

Frigate machines sealing surfaces to ≤0.4 µm Ra and flatness within 25 µm to ensure proper gasket compression. Plates are optionally helium leak-tested to <1×10⁻⁹ mbar∙L/s per ISO 20485 standards. Bolt hole patterns and flange surfaces are CNC-aligned to avoid distortion under torque. Final inspection includes dye penetrant checks for micro-cracks and inclusion-free verification of sealing areas.

Can Frigate manufacture Vacuum Chamber Port Plates for dissimilar metal joints with bimetallic interfaces?

Yes, Frigate fabricates bimetallic port plates using explosion-bonded or transition-welded flanges between stainless steel and aluminum. These are used when the chamber body and port plate must accommodate different CTE values. Bond interfaces are verified using ultrasonic or X-ray testing. This prevents thermal stress failure during high-temperature operation.

What customization options does Frigate offer for multi-port Vacuum Chamber Port Plates?

Frigate supports custom bore layouts with CF, KF, and ISO ports on a single plate, with ±50 µm hole position accuracy. Optional integrated threads for instrumentation, viewports, or rotary feedthroughs are available. CAD-based fabrication ensures alignment with internal chamber components. This enables reduced installation time and eliminates post-machining.

How does Frigate address material purity concerns for UHV-grade Vacuum Chamber Port Plates?

Frigate sources vacuum-rated 316L or 304L stainless steel with mill test certificates confirming sulfur content <0.005%. Material is batch-tested using optical emission spectroscopy to detect contaminants. Plates for UHV systems undergo vacuum bake-out and electropolishing to reduce hydrogen and hydrocarbon outgassing. This meets <10⁻¹⁰ Torr requirements in surface science applications.

How does Frigate verify dimensional stability of Vacuum Chamber Port Plates after thermal cycling?

Frigate performs post-machining stress relief using controlled thermal annealing to minimize residual stress. Sample plates are thermally cycled to simulate bake-out conditions. Dimensional checks before and after cycles confirm deformation is within design limits. This ensures reliable sealing and port alignment after repeated vacuum operations.

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